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Publications

Selected Publications

"Investigations of Particle Penetration in Fibrous Filters: Part I. Experimental." Journal of Institutional Environmental Science Technololgy, vol. 42, no. 1, pp. 32-40, 1999 (with S. Dhaniyala).

"Investigations of Particle Penetration in Fibrous Filters:Part II, Theorectical." Journal of Institutional Environmental Science Technololgy, vol. 42, no. 2, pp. 40-46, 1999 (with S. Dhaniyala).

"Charge Density Measurement of Electret Filters Using-Alpha Ray Ionization Radiation." Filtration and Separation, vol. 36, no. 4, pp. 51-56, 1999 (with F.J. Romay and S.J. Chae).

"Particulate Contamination in the Next Generation Fab: Standardization of Defect Inspecting Tools." Future Fab, pp. 229-237, Technology Publishing, Ltd., London, 1999 (S.K. Chae, J.J. Sun, and S.H. Yoo).

"A Method to Increase Wet Scrubbers' Control Efficiencies for Submicron Particles and Particulate Metals." Journal of Air Waste Management Association, vol. 44, pp. 184-185, 1994 (with J. Sun, P.H. McMurry, and S. Greenwood).

"Role of Water Vapor and Trace Impurities in Particle Formation During Vacuum Pump Down." Semiconductor International, vol. 17, no. 3, pp. 75-80, 1994.

"Condensation-Induced Particle Formation During Vacuum Pump Down." Journal of Electrochemical Society, vol. 140, pp. 1463-1468, 1993 (with Y. Ye and D.Y.H. Pui).

"Experimental Study of Aerosol Filtration in the Transition Flow Regime." Aerosol Science Technology, vol. 16, pp. 227-235, 1992 (with Z. Zhang).

"The Formation of Water Aerosols During Pump Down." Solid State Technology, vol. 34, pp. 85-89, 1991 (with J. Zhao and T.H. Kuehn).

"Aerosols." Encyclopedia of Applied Physics, vol. 1, pp. 415-441, 1991 (with D.Y.H. Pui).