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Uwe Kortshagen Distinguished McKnight University Professor E-mail: uk@me.umn.edu Telephone: (612) 625-4028 |
Department Head Habilitation, Experimental Physics, 1995, University of Bochum, Germany Dr. rer. nat., Physics, 1991, University of Bochum, Germany Diploma in Physics, 1988, University of Bochum, Germany |
Research Primary research interest is in plasma processes for advanced technological applications. Recent investigations are concerned with radio frequency sustained plasmas used for semiconductor manufacturing and for advanced light sources. These studies include probe diagnostics of the plasma electrons, measurements of the ion energy distribution, optical emission and absorption plasma spectroscopy, and multidimensional kinetic, numerical modeling of complete discharge systems. Further research interests are in plasma chemistry and nanoparticle generation in plasmas. Laboratories
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