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Office: 2101F Mechanical Engineering
Habilitation 1995, Experimental Physics, University of Bochum, Germany
Dr. rer. nat. 1991, Physics, University of Bochum, Germany
Diploma 1988, Physics, University of Bochum, Germany
Primary research interest is in plasma processes for advanced technological applications. Recent investigations are concerned with radio frequency sustained plasmas used for semiconductor manufacturing and for advanced light sources. These studies include probe diagnostics of the plasma electrons, measurements of the ion energy distribution, optical emission and absorption plasma spectroscopy, and multidimensional kinetic, numerical modeling of complete discharge systems. Further research interests are in plasma chemistry and nanoparticle generation in plasmas.