University of Minnesota
University of Minnesota: Department of Mechanical Engineering
http://www.me.umn.edu/

kortshagen

Uwe Kortshagen

Distinguished McKnight University Professor and Department Head

Office: ME 1100C
Phone: 612-625-4028
Email: kortshagen@umn.edu

Habilitation 1995, Experimental Physics, University of Bochum, Germany
Dr. rer. nat. 1991, Physics, University of Bochum, Germany
Diploma 1988, Physics, University of Bochum, Germany

Publications

Research

Primary research interest is in plasma processes for advanced technological applications. Recent investigations are concerned with radio frequency sustained plasmas used for semiconductor manufacturing and for advanced light sources. These studies include probe diagnostics of the plasma electrons, measurements of the ion energy distribution, optical emission and absorption plasma spectroscopy, and multidimensional kinetic, numerical modeling of complete discharge systems. Further research interests are in plasma chemistry and nanoparticle generation in plasmas.

Laboratories

Kortshagen Research Group

High Temperature and Plasma Laboratory