NEMS (Nanoelectromechanical System) is used to describe devices integrating electrical and mechanical functionality on the nanoscale.
Compared with field transistor, nano-switch has sharper switching characteristics. This may help reduce power consumption. Graphene is a two-dimensional honeycomb-arranged crystal of carbon atoms, which has very unique electrical and mechanical properties. Currently graphene is considered to be an excellent material for NEMS. We used a novel way to transfer patterned graphene flakes onto desired substrate and fabricated free-standing graphene arrays. The top graphene film could be pulled into electrical contact with the low resistive silicon substrate by applying DC voltage between them. Contact was broken by elastic forces after bias was removed.