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Research Centers Providing Partnership with Industry

(PIs: B. Liu and D. Pui)

• Established in 1985 with 4 companies

• 17 Past and Current Members including:

  Applied Materials, NIST, PMS, Samsung, ITRI, IBM, Delco, Airco, Air Products, Liquid Air, Control Data, Texas Instruments, Donaldson, FSI, Nupro, Millipore, TSI

• 36 graduate students have completed the program, including 25 Ph.D. students

• 75% of graduates are working in microelectronics companies

• Particle Measurement in Low Pressure Systems
• Contamination Control in VLSI fabrication
• Wafer Megasonic Cleaning
• Particle Formation in Semiconductor Manufacturing Tools
• Particle Adhesion and Reentrainment
• Clean Room Studies

(PIs: J. Davidson, T. Kuehn, D. Pui)

• Established in 1991
• 7 Current Members include:
  • Donaldson
  • 3M
  • Honeywell
  • AAF International
  • TSI
  • Fleetguard
  • W. L. Gore & Associates
• 4 Ph.D. and 4 M.S. students have completed the program
• Currently 9 graduate students and 2 post-docs
• 5 faculty investigators

• Filtration Mechanisms
• Filter Testing Methods
• Filter Pleating Design
• Electret Filtration
• Bioaerosol Filtration
• Ultrafine Aerosol Filtration
• Filter Inhomogeneity
• Liquid Filtration
• Evaluation of Activated Carbon Filters for Removal of Ozone at the ppb Level
• Ozone Generation By Indoor, Electrostatic Air Cleaners
• Removal of Gas Pollutants from Indoor Air

Environmental Engineering and Particle Technology Homepage